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Academic Year | 2012 |
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Category of Thesis | Conference paper |
論文等級 | Invited talk |
Title of paper | Comparison of Characteristics of Rapid Thermal and Microwave Annealed Amorphous Silicon Thin Films Prepared by Electron Beam Evaporation and Low Pressure Chemical Vapor Deposition |
Titles of conference | 2012 International Conference of Health, Structure, Material and Environment (HSME 2012) |
Start from | 2012-12-04 |
End | 2012-12-05 |
Year of publication | 2012 |
Chinese name | Huai-Yi Chen |
English name | Huai-Yi Chen |
Authors | C. H. Hsieh, L. T. Tsou, S. H. Chen, H. Y. Chen, Y. J. Lee, C. H. Lai and H. S. Koo |
Number of authors | 7 |
作者型態 | Corresponding Author |
Location or Place location of meeting | Shenzhen , China |
Language | 英文 |