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Academic Year | 2013 |
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Journal Ranking | EI |
Title of paper | Comparison of Characteristics of Rapid Thermal and Microwave Annealed Amorphous Silicon Thin Films Prepared by Electron Beam Evaporation and Low Pressure Chemical Vapor Deposition |
Journal | Advanced Materials Research |
Date of Publication | 2013-02-01 |
Volume | 663 |
起迄頁 | 372 |
起迄頁 | 376 |
總頁數 | 5 |
Chinese name | Huai-Yi Chen |
English name | Huai-Yi Chen |
Authors | C. H. Hsieh, L. T. Tsou, S. H. Chen, H. Y. Chen, Y. J. Lee, C. H. Lai and H. S. Koo |
Number of authors | 7 |
作者型態 | Corresponding Author |
Language | 英文 |